Temperature, pressure, deformation sensors with frequency output on basis of oxide electronics
Detectors are implemented on basis of MOM structures based on transient metal oxides, which keep switching from BAXS-type and are prospective in respect to different electronic devices and sensitive elements of sensor-based system.
Dependence of oscillation frequency (relaxation oscillation) on external factors determines a possibility to use these structures as detectors of different size, which have many advantages in comparison with existing prototypes.
- small size,
- integration technology is compatible with modern one,
- high speed of operation,
- low threshold power.