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Temperature, pressure, deformation sensors with frequency output on basis of oxide electronics


Detectors are implemented on basis of MOM structures based on transient metal oxides, which keep switching from BAXS-type and are prospective in respect to different electronic devices and sensitive elements of sensor-based system.

Dependence of oscillation frequency (relaxation oscillation) on external factors determines a possibility to use these structures as detectors of different size, which have many advantages in comparison with existing prototypes.

Detectors’ advantages:
  • small size,
  • sandwich-configuration,
  • integration technology is compatible with modern one,
  • high speed of operation,
  • low threshold power.
Legal protection
Patent of RF for the invention №2392694 «Method for production of photovoltaic element» dated 20.06.2010.

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Petrozavodsk State University
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